SAI Gas Sensing system is versatile system which can be used for Gas Mixing cum Sensing requirements. System is designed in such a way that control Gas Flow and record I-V characteristics etc. Gas sensing System Uses MFC with Gas Mixing Software and Source Meter to record I-V Characteristics. It is a customised product and every user has different requirements.
Vacuum Chamber | SS304 Vacuum chamber cylindrical in shape having internal dimensions of 150mm (dia) x 200mm (H) or smaller or Bigger as per User requirement. Chamber is provided with BE-2 feedthrough for Electrical connections in the base and a toughened glass view Port on the top side. |
Substrate Heater | A Resistive Heater which can achieve Temp. Upto 250 Deg C with PID Temperature Controller is provided. Power to the heaters is smoothly controlled by means of Thyristor power controller. |
Substrate Holder | A Thin Alumina Plate is fixed on top of Resistive Heater for sample mounting. |
Mass Flow Controllers | Ar or N2 or O2 or any other MFCs can be provided as per User requirement. |
Gas Mixing Software | A Propriety Gas Mixing Software is provided to mix maximum of 6 Gases as Blend. |
Source Meter | A Reputed make Source Meter is used to measure V-I values and plot Graph. A high end Source Meter from Keithley has capacity to measure and Plot I-V Characteristics. It has its own Memory to Store parameters. It also has capabity to to store in external Pen Drive in Excel Format. |
Vacuum Pump | Double stage Oil Rotary Vacuum Pump or Dry Pump of suitable capacity of reputed brand as per system requirement. |
Vacuum Gauge | Digital high Pressure Pirani Gauge to measure Vacuum from Atm. To 10-3 mbar is provided |
Automation | For Gas mixing requirements, A desktop or Laptop is required with RS232 Port. PC can be interfaced with Source Meter also if Source meter has capability. |
Power | 230VAC, 50 Hz, Single Phase. |
Gases | Process Gas, Cylinders with Regulators, Connection Pipes etc. |