- Vacuum Pumps
- Vacuum Pumping System
- Vacuum Guages
- Gas Mixing Cum Sensing System
- Mass Flow Controller
- Vacuum Components & Hardware
- Thermal & Electron Beam Gun Deposition System
- RF & DC Sputtering System
- SEM Sputter Coater
- Ion Assistant Deposition Systems
- CVD System
- Plasma Etch System
- Atomic Layer Deposition System
- Spin Coater
- Dip Coater
- Langmuir Blodgett System
- Deposition Materials
- Cryostate
- Magnetic Stirrer
- Hot Plate
- Auto Clave
- Centrifuge
- Cooling Refrigerator
Gas Sensing System
MANUFACTURER OF VACUUM COATERS/GAS SENSING SYSTEMS/LPCVD SYSTEMS
SAI Gas Sensing system is versatile system which can be used for Gas Mixing Cum Gas Sensing requirements. System is designed in such a way that desired Gas Mixture ( PPM to PPB Range ) is prepared through MFCs and customised Software and purged into Chamber in a controlled way to record I-V characteristics through Source Meter. It is a customised product and every user has different requirements and system is customised accordingly.
GAS SENSING SET UP GENERAL SPECIFICATIONS
| Gas Sensing Chamber | SS304 Vacuum chamber cylindrical or Hemispherical in shape or customised as per User requirement. Chamber is provided with feedthrough for Electrical connections in the base and a toughened glass or Quartz Window View Port on the top side. Ports are provided for Vacuum, I-V Measurements etc. |
| Substrate Heater | A Resistive Heater which can achieve Temp. Upto 250-600 Deg C with PID Temperature Controller is provided. Power to the heaters is smoothly controlled by means of Thyristor power controller. |
| Substrate Holder | A Thin Alumina Plate is fixed on top of Resistive Heater for sample mounting. |
| Manipulator | 2 or 3 or 4 Probe Manipulators Electrically Insulated provided to measure specimen, current; resistance etc. from any point across the sample (30mm dia) mounted on the heater constant temperature zone. Probes have sharp bent tip at the free end and other end connected with electrical leads. The electrical are terminated with a high Electrical Feed through mounted onto the Port. The Electrical Probes are made of chemically Inert and high Temperature compatible Material which does not lose its stiffness with thermal Cycling. A matching socket is provided for electrical connection outside the chamber. The sample holder should have options for contact of varying samples size the contact should not loose tension at higher temperature measurement. Micromanipulators should have X-Y-Z linear-motion travel |
| Mass Flow Controllers | MFCs are provided for Carrier Gas and Sample Gas as per User requirement. |
| Gas Mixing Software ( PPM to PPB Mixing ) | A Propriety Gas Mixing Software is provided to mix maximum of 6 Gases as Blend. For Gas Sensing application, Carrier Gas and Sample Gas is required and desired concentration in PPM to PPB range is defined in the Gas Mixing Software as per User requirement. For Gas mixing requirements, A desktop or Laptop is required with RS232 Port. PC can be interfaced with Source Meter also if Source meter has capability. |
| Source Meter | A Reputed make like Keithley SMU 2450 Source Meter is used to measure V-I values and plot Graph. A high end Source Meter from Keithley has capacity to measure and Plot I-V Characteristics. It has its own Memory to Store parameters. It also has capability to store in external Pen Drive in Excel Format. |
| Vacuum Pump | Unit shall be provided with double stage direct driven Rotary Vacuum Pump to achieve Vacuum 5 x 10-3 m.bar at the mouth of Pump and a Digital Pirani Vacuum Gauge. |
| Humidity Sensor | Provided to measure the humidity inside the gas chamber. |
| Power | 230VAC, 50 Hz, Single Phase. |
| Gases | Process Gas, Cylinders with Regulators, Connection Pipes etc. as per User requirement. |
